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Analysis usually begins with a visual examination under one of our optical microscopes. We also have an atomic force microscope (AFM) for special studies.

Chemical analysis is achieved by Scanning Auger Microprobe, magnetic sector SIMS or LIMA using the instruments described below.
 

 


SIMS

Cameca

ims 4f

ims 3f

Mass range: 0 to 300 amu.
Mass resolution: continuously variable from 200 to 8000 .
Ion Sources : Duoplasmatron and caesium thermal ionisation .
Flood gun: Normal incidence electron gun for charge compensation of insulating samples in positive and negative secondary ion mode.
Dynamic Transfer secondary ion optics: for increased analytical sensitivity .
Analysis area : continuously variable from 2.5µm to 250µm square .
Secondary electron imaging : for feature identification at low currents.
Scanning ion imaging: for selected area analysis.
Resistive anode imaging system: for selected area analysis.
Sample rotation stage: for optimisation of topography in deep profiles and depth profiling of metal layers.


Auger

JEOL

Jamp 10s

 

Electron beam energy: variable from 2.0 to 25.0keV
Spot size : variable from 100nm to 100µm.
N(E) or dN(E) spectra: for compatibility.
Auger electron imaging: for feature identification.
Backscattered electron imaging: for compositional or topographical imaging .
Argon ion gun: for composition depth profiling.


LIMA

CMS

LIMA 2A

Ionisation: Laser ablation
Analyser: reflectron time of flight (ToF) mass spectrometer.
Analysis volume: less than a cubic micron.
Analysis capability: qualitative elemental and chemical (molecular fragment) information from small features.
Specially suitable for: analysis of particulates and finely divided materials.

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